Silicon Thermal Oxide Thickness Calculator

DRAG & DROP OR PASTE SPECTRUM DATA ANYWHERE

Supports text spectrum data with a wavelength and reflectance percentage (in that order) on each line. These fields can be delimited with whitespace (spaces or tabs) or commas. Will automatically ignore lines that do not match this format. Will automatically normalize percentage (i.e. .75 vs 75). Supports Ocean View spectrum data. Typical SiO2 refractive index data provided by Filmetrics. Reflectance calculated by reflectance(λ) = offset + amplitude * cos(4 * π * n(λ) * thickness / λ) where λ is the wavelength and n is the index of refraction as a function of wavelength. For more information on measuring thin films check out this guide from Filmetrics and this lecture by Michel van Biezen.

Model Thickness
Model Offset
Model Amplitude